Products
Products
CCSS Equipment
Chemical Supply System
Organic System
Features
-
· Bulk organic chemical supply for semiconductor and display
Specification
-
· HMI: 15 Inch Touch PC
· Controller: PLC Base(OMRON)
· Communication: CLK/Ethernet/RS 232-C
· Capacity: 10 lpm
· Supply Type: N2 Pressure
· Supply Pressure: Max. 60 psi
· Supply Flow: 2~15 lpm
Inorganic System
Features
-
· Bulk inorganic chemical supply for semiconductor and display
Specification
-
· HMI: 15 Inch Touch PC
· Controller: PLC Base(OMRON)
· Communication: CLK/Ethernet/RS 232-C
· Capacity: 10 lpm
· Supply Type: N2 Pressure
· Supply Pressure: Max. 60 psi
· Supply Flow: 2~15 lpm
ACQC System
Features
-
· ACQC for high flow chemical (automatic connection system)
Specification
-
· HMI: 12 Inch Touch Screen
· Controller: PLC Base(OMRON)
· Communication: CLK/Ethernet/RS 232-C
· Capacity: 10 lpm
· Supply Type: Pump(Bellows)
· Supply Pressure: Max. 60 psi
· Supply Flow: 20 lpm
