Products
Products
CCSS Equipment
Slurry Supply System
2in1 System (I Type)
Features
-
. Type : Ceria, Additive, Oxide, Poly, Tungsten, Copper
. Dilution with Slurry and DIW with other Chemicals
Specification
-
. HMI: 19 inch Touch PC
· Controller: PLC Base(OMRON)
· Communication: CLK/Ethernet/RS 232-C
· Capacity: 4~6 lpm
· Dimension: 3,600*2,000*2,200mm 2ea
· Mixing Volume: 8~45ℓ
· Mixing Accuracy: ± 0.05%
· Mixing Recipe: Selective Use
· Supply Type: Centrifugal Pump(Levitronix BPS 4, 2,000, 4,000)
· Supply Pressure: Max. 60 psi
· Supply Flow: 2~15 lpm
· Reliable Verification Method: Conductivity, Density, Concentration
2in1 System (U Type)
Features
-
. Type : Ceria, Additive, Oxide, Poly, Tungsten, Copper
. Dilution with Slurry and DIW with other Chemicals
Specification
-
. HMI: 19 inch Touch PC
· Controller: PLC Base(OMRON)
· Communication: CLK/Ethernet/RS 232-C
· Capacity: 4~6 lpm
· Dimension: 3,400*2,000*2,200mm 2ea, 1,000*850*2,200mm 1ea
· Mixing Volume: 8~45ℓ
· Mixing Accuracy: ± 0.05%
· Mixing Recipe: Selective Use
· Supply Type: Centrifugal Pump(Levitronix BPS 4, 2,000, 4,000)
· Supply Pressure: Max. 60 psi
· Supply Flow: 2~15 lpm
· Reliable Verification Method: Conductivity, Density, Concentration
3in1 System
Features
-
. Type : Ceria, Additive, Oxide, Poly, Tungsten, Copper
. Dilution with Slurry and DIW with other Chemicals
Specification
-
· HMI: 19 inch Touch PC
· Controller: PLC Base(OMRON)
· Communication: CLK/Ethernet/RS 232-C
· Capacity: 4~6 lpm
· Dimension: 3,700*1,900*2,300mm
· Mixing Volume: 8~15ℓ
· Mixing Accuracy: ± 0.05%
· Mixing Recipe: Selective Use
· Supply Type: Centrifugal Pump(Levitronix BPS 4)
· Supply Pressure: Max. 60 psi
· Supply Flow: 2~6 lpm
· Reliable Verification Method: Conductivity, Density, Concentration
OSS(Optimized Slurry System)
Features
-
. Type : Ceria, Additive, Oxide, Poly, Tungsten, Copper
. Dilution with Slurry and DIW with other Chemicals
Specification
-
. HMI: Touch Screen or Touch PC
· Controller: PLC Base(OMRON)
· Communication: CLK/Ethernet/RS 232-C
· Capacity: 4~6 lpm
· Dimension: 1,600*1,000*2,000mm
· Mixing Volume: 8~15ℓ
· Mixing Accuracy: ± 0.05%
· Mixing Recipe: Selective Use
· Supply Type: Centrifugal Pump(Levitronix BPS 4)
· Supply Pressure: Max. 60 psi
· Supply Flow: 2~6 lpm
· Reliable Verification Method: Conductivity, Density, Concentration