Products
Products
Slurry Supply System
Slurry Supply System
Drum Shaker
Features
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· Integrated anti-precipitation system for drum-stored slurry solution
Specification
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· Dimension: 1,400*1,300*1,600mm
· HMI: 8 Inch Touch Screen
· Power: AC 220V 3P 60Hz
· Maximum Load: Max. 300Kg
· Rotate Speed: 0~12 RPM
· Controller: PLC Base(OMRON)
· Communication: CLK/RS 232-C
Filter Dry Box(Bar Type)
Features
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· Filter residue removal and N2 drying system
Specification
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· Waste Filter Cleaning Equipment
· Dimension: 1,200*1,000*1,600mm
· Power: AC 220V 1P 60Hz
· Capa., Lead Time: Max. 34ea, 24hr
Filter Dry Box(Circle Type)
Features
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· Filter residue removal and thermal drying system
Specification
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· Waste Filter Clean & Neutralization Equipment
· Dimension: 1,600*1,100*1,960mm
· Power: AC 220V 3P 60Hz
· Capa., Lead Time: Max. 64ea, 3hr
Automatic Filter Replacement Machine
Features
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. A fully automated solution for safe and efficient filter replacement
Specification
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· Dimension: 1,950*1,916*2,200mm
· Power: AC 220V 1P 60Hz
· Filter Exchange Capa.: 4ea
VMB
Features
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· Reliable VMB for secure H2O2 distribution
Specification
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· H2O2 distribution device
· Dimension: 800*390*1,500mm
· Power: AC 220V 1P 60Hz
· Pipe Hook-up Points: 5ea
Auto Drum Carrier
Features
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· Electric drum transport & mounting equipment
Specification
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· Dimension: 680*974*1,052mm
· Power: AC 220V 1P 60Hz
· Max. Load: 300kg
Organic System
Features
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· Bulk organic chemical supply for semiconductor and display
Specification
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· HMI: 15 Inch Touch PC
· Controller: PLC Base(OMRON)
· Communication: CLK/Ethernet/RS 232-C
· Capacity: 10 lpm
· Supply Type: N2 Pressure
· Supply Pressure: Max. 60 psi
· Supply Flow: 2~15 lpm
2in1 System (I Type)
Features
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. Type : Ceria, Additive, Oxide, Poly, Tungsten, Copper
. Dilution with Slurry and DIW with other Chemicals
Specification
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. HMI: 19 inch Touch PC
· Controller: PLC Base(OMRON)
· Communication: CLK/Ethernet/RS 232-C
· Capacity: 4~6 lpm
· Dimension: 3,600*2,000*2,200mm 2ea
· Mixing Volume: 8~45ℓ
· Mixing Accuracy: ± 0.05%
· Mixing Recipe: Selective Use
· Supply Type: Centrifugal Pump(Levitronix BPS 4, 2,000, 4,000)
· Supply Pressure: Max. 60 psi
· Supply Flow: 2~15 lpm
· Reliable Verification Method: Conductivity, Density, Concentration
Inorganic System
Features
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· Bulk inorganic chemical supply for semiconductor and display
Specification
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· HMI: 15 Inch Touch PC
· Controller: PLC Base(OMRON)
· Communication: CLK/Ethernet/RS 232-C
· Capacity: 10 lpm
· Supply Type: N2 Pressure
· Supply Pressure: Max. 60 psi
· Supply Flow: 2~15 lpm
2in1 System (U Type)
Features
-
. Type : Ceria, Additive, Oxide, Poly, Tungsten, Copper
. Dilution with Slurry and DIW with other Chemicals
Specification
-
. HMI: 19 inch Touch PC
· Controller: PLC Base(OMRON)
· Communication: CLK/Ethernet/RS 232-C
· Capacity: 4~6 lpm
· Dimension: 3,400*2,000*2,200mm 2ea, 1,000*850*2,200mm 1ea
· Mixing Volume: 8~45ℓ
· Mixing Accuracy: ± 0.05%
· Mixing Recipe: Selective Use
· Supply Type: Centrifugal Pump(Levitronix BPS 4, 2,000, 4,000)
· Supply Pressure: Max. 60 psi
· Supply Flow: 2~15 lpm
· Reliable Verification Method: Conductivity, Density, Concentration
ACQC System
Features
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· ACQC for high flow chemical (automatic connection system)
Specification
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· HMI: 12 Inch Touch Screen
· Controller: PLC Base(OMRON)
· Communication: CLK/Ethernet/RS 232-C
· Capacity: 10 lpm
· Supply Type: Pump(Bellows)
· Supply Pressure: Max. 60 psi
· Supply Flow: 20 lpm
3in1 System
Features
-
. Type : Ceria, Additive, Oxide, Poly, Tungsten, Copper
. Dilution with Slurry and DIW with other Chemicals
Specification
-
· HMI: 19 inch Touch PC
· Controller: PLC Base(OMRON)
· Communication: CLK/Ethernet/RS 232-C
· Capacity: 4~6 lpm
· Dimension: 3,700*1,900*2,300mm
· Mixing Volume: 8~15ℓ
· Mixing Accuracy: ± 0.05%
· Mixing Recipe: Selective Use
· Supply Type: Centrifugal Pump(Levitronix BPS 4)
· Supply Pressure: Max. 60 psi
· Supply Flow: 2~6 lpm
· Reliable Verification Method: Conductivity, Density, Concentration