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CCSS Equipment

Chemical Supply System

Organic System
Organic System
Features
    · Bulk organic chemical supply for semiconductor and display
Specification
    · HMI: 15 Inch Touch PC
    · Controller: PLC Base(OMRON)
    · Communication: CLK/Ethernet/RS 232-C
    · Capacity: 10 lpm
    · Supply Type: N2 Pressure
    · Supply Pressure: Max. 60 psi
    · Supply Flow: 2~15 lpm
Inorganic System
Inorganic System
Features
    · Bulk inorganic chemical supply for semiconductor and display
Specification
    · HMI: 15 Inch Touch PC
    · Controller: PLC Base(OMRON)
    · Communication: CLK/Ethernet/RS 232-C
    · Capacity: 10 lpm
    · Supply Type: N2 Pressure
    · Supply Pressure: Max. 60 psi
    · Supply Flow: 2~15 lpm
ACQC System
ACQC System
Features
    · ACQC for high flow chemical (automatic connection system)
Specification
    · HMI: 12 Inch Touch Screen
    · Controller: PLC Base(OMRON)
    · Communication: CLK/Ethernet/RS 232-C
    · Capacity: 10 lpm
    · Supply Type: Pump(Bellows)
    · Supply Pressure: Max. 60 psi
    · Supply Flow: 20 lpm
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